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Proceedings Paper

Towards the fast DSA: improvement of computational performance of the DSA model
Author(s): Azat Latypov
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Paper Abstract

The approaches to improve the performance of the DSA (directed self-assembly) computational models are being reviewed and discussed. We start by reviewing the computational complexity of a rigorous self-consistent field theory (SCFT) DSA model and also the currently utilized ways to reduce this computational complexity and improve its performance, as implemented in GLOBALFOUNDRIES DSA Solver. We proceed with presenting new approximations in the SCFT model making it possible to improve the computational performance of the DSA model further.

Paper Details

Date Published: 28 March 2014
PDF: 9 pages
Proc. SPIE 9049, Alternative Lithographic Technologies VI, 904923 (28 March 2014); doi: 10.1117/12.2046048
Show Author Affiliations
Azat Latypov, GLOBALFOUNDRIES Inc. (United States)

Published in SPIE Proceedings Vol. 9049:
Alternative Lithographic Technologies VI
Douglas J. Resnick; Christopher Bencher, Editor(s)

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