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Proceedings Paper

Self-consistent field theory of directed self-assembly on chemically prepatterned surfaces
Author(s): Kenichi Izumi; Nabil Laachi; XingKun Man; Kris T. Delaney; Glenn H. Fredrickson
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Paper Abstract

We use self-consistent field theory to investigate the self-assembly of AB diblock copolymers on chemically patterned substrates. The striped substrates consist of attractive domains alternating with neutral ones. Using our simulations, we observe the formation of different self-assembled morphologies in the polymer film and compute their formation free energy for various pattern widths and wetting conditions. We found that perpendicular lamellae are best formed when the A-attractive stripes have a width near half the natural lamellar period in bulk, but lamellar structures with wide bases are also formed in wide stripes. We also computed the formation energy of isolated dislocations and found that the energy cost is ≈ 50-110kT for ±15nm deviations from optimal commensurability conditions.

Paper Details

Date Published: 28 March 2014
PDF: 7 pages
Proc. SPIE 9049, Alternative Lithographic Technologies VI, 904922 (28 March 2014); doi: 10.1117/12.2045917
Show Author Affiliations
Kenichi Izumi, Univ. of California, Santa Barbara (United States)
JSR Corp. (Japan)
Nabil Laachi, Univ. of California, Santa Barbara (United States)
XingKun Man, Univ. of California, Santa Barbara (United States)
Kris T. Delaney, Univ. of California, Santa Barbara (United States)
Glenn H. Fredrickson, Univ. of California, Santa Barbara (United States)

Published in SPIE Proceedings Vol. 9049:
Alternative Lithographic Technologies VI
Douglas J. Resnick; Christopher Bencher, Editor(s)

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