Share Email Print

Proceedings Paper

Atomic collision effects during PLD processes: nonstoichiometry control in transparent superconductors
Author(s): Taro Hitosugi; D. Packwood; S. Shiraki
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The pulsed laser deposition (PLD) growth processes of spinel lithium titanates, Li4Ti5O12 and LiTi2O4, on MgAl2O4 (111) substrates are investigated. Although a Li4Ti5O12 target was used for the depositions, the Li/Ti atomic ratio of the species arriving at the substrate during deposition was only ~0.5, enabling high quality LiTi2O4 films to be prepared with a rocking curve full-width at half-maximum of ~0.05°. The LiTi2O4 epitaxial thin films exhibited high conductivity at room temperature (~3.0 × 103 Ω−1cm−1) and a superconducting transition temperature of ~13.3 K. These values are the highest recorded for epitaxial thin films. Moreover, the effect of collisions between the atoms in a plume were studied quantitatively. These results demonstrate the importance of the target composition, providing further insight into Licontaining metal-oxide deposition processes using PLD.

Paper Details

Date Published: 8 March 2014
PDF: 6 pages
Proc. SPIE 8987, Oxide-based Materials and Devices V, 89870U (8 March 2014); doi: 10.1117/12.2045551
Show Author Affiliations
Taro Hitosugi, Tohoku Univ. (Japan)
D. Packwood, Tohoku Univ. (Japan)
S. Shiraki, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 8987:
Oxide-based Materials and Devices V
Ferechteh H. Teherani; David C. Look; David J. Rogers, Editor(s)

© SPIE. Terms of Use
Back to Top