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Proceedings Paper

Atomic collision effects during PLD processes: nonstoichiometry control in transparent superconductors
Author(s): Taro Hitosugi; D. Packwood; S. Shiraki
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Paper Abstract

The pulsed laser deposition (PLD) growth processes of spinel lithium titanates, Li4Ti5O12 and LiTi2O4, on MgAl2O4 (111) substrates are investigated. Although a Li4Ti5O12 target was used for the depositions, the Li/Ti atomic ratio of the species arriving at the substrate during deposition was only ~0.5, enabling high quality LiTi2O4 films to be prepared with a rocking curve full-width at half-maximum of ~0.05°. The LiTi2O4 epitaxial thin films exhibited high conductivity at room temperature (~3.0 × 103 Ω−1cm−1) and a superconducting transition temperature of ~13.3 K. These values are the highest recorded for epitaxial thin films. Moreover, the effect of collisions between the atoms in a plume were studied quantitatively. These results demonstrate the importance of the target composition, providing further insight into Licontaining metal-oxide deposition processes using PLD.

Paper Details

Date Published: 8 March 2014
PDF: 6 pages
Proc. SPIE 8987, Oxide-based Materials and Devices V, 89870U (8 March 2014); doi: 10.1117/12.2045551
Show Author Affiliations
Taro Hitosugi, Tohoku Univ. (Japan)
D. Packwood, Tohoku Univ. (Japan)
S. Shiraki, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 8987:
Oxide-based Materials and Devices V
Ferechteh H. Teherani; David C. Look; David J. Rogers, Editor(s)

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