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Proceedings Paper

The effect of environmental conditions on designing of a photonic crystal force sensor
Author(s): Longqiu Li; Tianlong Li; Wenping Song; Guangyu Zhang; Yao Li
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Paper Abstract

Microcantilever sensors have been widely used in designing force, strain and biochemical sensors. The fast-growing applications in nanoelectromechanical systems (NEMS) lead to strong demands to downsize the sensing elements to nanometer scale. In this paper, the detected environment on the performance of this photonic crystal sensor is investigated. The nanocavity, which can be used to localize the electromagnetic field in a low refractive index region, is a new sensing method to measure nano-scaled deformation. Through numerical simulation, we demonstrate that the range of the force sensor in each component force in X and Y directions are 0-1μN. In X direction, the minimum detectable applied forces are about 0.057μN and 0.070μN for the microcantilever operated in the water and air, respectively. And these in Y direction are 0.043μN and 0.053μN, respectively. Hence, it shows that a better resolution of applied force can be achieved in water than in air.

Paper Details

Date Published: 8 March 2014
PDF: 7 pages
Proc. SPIE 9061, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014, 90612L (8 March 2014); doi: 10.1117/12.2045235
Show Author Affiliations
Longqiu Li, Harbin Institute of Technology (China)
Tianlong Li, Harbin Institute of Technology (China)
Wenping Song, Harbin Institute of Technology (China)
Guangyu Zhang, Harbin Institute of Technology (China)
Yao Li, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 9061:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2014
Jerome P. Lynch; Kon-Well Wang; Hoon Sohn, Editor(s)

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