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Proceedings Paper

PZT-actuated, 2D optical scanning image acquisition
Author(s): Kebin Gu; Keng-Ren Lin; Wei-Chih Wang
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Paper Abstract

An image acquisition utilizing a 2D piezoelectric actuated optical scanner is presented. Fabrication and testing of a micromachined optically transmissive cantilever waveguide that operates in the resonant mode is presented with its application as a micro-optical scanner. The optical waveguide has a smaller cross-sectional area (2 µm × 5 µm) than our previous study (62.5 to 420 mm). The scanner is consisted of a single mode optical fiber (SMF28e) mounted on a X-Y coupled piezoelectric bimorphs operating at the actuators’ resonant frequencies of 50 Hz and 128 Hz. The scanner achieves a 3.14 mm vertical and 0.61 mm horizontal tip displacements with a ±10V input.

Paper Details

Date Published: 16 April 2014
PDF: 9 pages
Proc. SPIE 9060, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2014, 906018 (16 April 2014); doi: 10.1117/12.2045183
Show Author Affiliations
Kebin Gu, Univ. of Washington (United States)
Keng-Ren Lin, National Cheng Kung Univ. (Taiwan)
Wei-Chih Wang, Univ. of Washington (United States)
National Cheng-Kung Univ. (Taiwan)


Published in SPIE Proceedings Vol. 9060:
Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2014
Vijay K. Varadan, Editor(s)

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