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Proceedings Paper

A new type of microphone using flexoelectric barium strontium titnate
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Paper Abstract

A flexoelectric bridge-structured microphone using bulk barium strontium titanate (Ba0.65Sr0.35TiO3 or BST) ceramic was investigated in this study. The flexoelectric microphone was installed in an anechoic box and exposed to the sound pressure emitted from a loud speaker. Charge sensitivity of the flexoelectric microphone was measured and calibrated using a reference microphone. The 1.5 mm×768 μm×50 μm micro-machined bridge-structured flexoelectric microphone has a sensitivity of 0.92 pC/Pa, while its resonance frequency was calculated to be 98.67 kHz. The analytical and experimental results show that the flexoelectric microphone has both high sensitivity and broad bandwidth, indicating that flexoelectric microphones are potential candidates for many applications.

Paper Details

Date Published: 8 March 2014
PDF: 7 pages
Proc. SPIE 9062, Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014, 90620Y (8 March 2014); doi: 10.1117/12.2045072
Show Author Affiliations
Seol ryung Kwon, North Carolina State Univ. (United States)
Wenbin Huang, North Carolina State Univ. (United States)
Shujun Zhang, The Pennsylvania State Univ. (United States)
Fuh-Gwo Yuan, North Carolina State Univ. (United States)
Xiaoning Jiang, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 9062:
Smart Sensor Phenomena, Technology, Networks, and Systems Integration 2014
Wolfgang Ecke; Kara J. Peters; Norbert G. Meyendorf; Theodoros E. Matikas, Editor(s)

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