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Proceedings Paper

Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities
Author(s): Lasse Karvonen; Tapani Alasaarela; Henri Jussila; Soroush Mehravar; Ya Chen; Antti Säynätjoki; Robert A. Norwood; Nasser Peyghambarian; Khanh Kieu; Seppo Honkanen; Harri Lipsanen
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Paper Abstract

We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO2) and zinc oxide (ZnO) with intermediate Al2O3 layers to limit the crystal size. The waveguide losses of TiO2/Al2O3 nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al2O3 nanolaminates can be enhanced by nanoscale engineering of the thin film structure.

Paper Details

Date Published: 7 March 2014
PDF: 9 pages
Proc. SPIE 8982, Optical Components and Materials XI, 89820O (7 March 2014); doi: 10.1117/12.2045006
Show Author Affiliations
Lasse Karvonen, Aalto Univ. (Finland)
Tapani Alasaarela, Aalto Univ. (Finland)
Henri Jussila, Aalto Univ. (Finland)
Soroush Mehravar, College of Optical Sciences, The Univ. of Arizona (United States)
Ya Chen, Aalto Univ. (Finland)
Antti Säynätjoki, Aalto Univ. (Finland)
Robert A. Norwood, College of Optical Sciences, The Univ. of Arizona (United States)
Nasser Peyghambarian, College of Optical Sciences, The Univ. of Arizona (United States)
Khanh Kieu, College of Optical Sciences, The Univ. of Arizona (United States)
Seppo Honkanen, Univ. of Eastern Finland (Finland)
Harri Lipsanen, Aalto Univ. (Finland)


Published in SPIE Proceedings Vol. 8982:
Optical Components and Materials XI
Michel J. F. Digonnet; Shibin Jiang, Editor(s)

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