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InGaZnO and ZnO/Al2O3 multilayer structures measured by optical and x-ray techniques
Author(s): Péter Petrik; Emil Agocs; Balint Fodor; Beatrix Pollakowski; Sabine Zakel; Thomas Gumprecht; Burkhard Beckhoff; Zoltan Labadi; Zsofia Baji; Michael Jank; Andreas Nutsch
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Paper Details

Date Published:
Proc. SPIE 8987, Oxide-based Materials and Devices V, 89872M; doi: 10.1117/12.2044931
Show Author Affiliations
Péter Petrik, Research Institute for Technical Physics and Materials Science (Hungary)
Emil Agocs, MTA-MFA (Hungary)
Balint Fodor, MTA-MFA (Hungary)
Beatrix Pollakowski, Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany (Germany)
Sabine Zakel, Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, Germany (Germany)
Thomas Gumprecht, Erlangen Graduate School in Advanced Optical Technologies (SAOT), Paul-Gordan-Strasse 9, 91052 Erlan (Germany)
Burkhard Beckhoff, Physikalisch-Technische Bundesanstalt (Germany)
Zoltan Labadi, MTA-MFA (Hungary)
Zsofia Baji, MTA-MFA (Hungary)
Michael Jank, Fraunhofer Institute for Integrated Systems and Device Technology, Schottkystrasse 10, 91058 Erlange (Germany)
Andreas Nutsch, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 8987:
Oxide-based Materials and Devices V
Ferechteh H. Teherani; David C. Look; David J. Rogers, Editor(s)

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