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Proceedings Paper

Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels
Author(s): Y. van de Burgt; Y. Bellouard
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Paper Abstract

Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth.

Paper Details

Date Published: 7 March 2014
PDF: 8 pages
Proc. SPIE 8969, Synthesis and Photonics of Nanoscale Materials XI, 896903 (7 March 2014); doi: 10.1117/12.2044774
Show Author Affiliations
Y. van de Burgt, Technische Univ. Eindhoven (Netherlands)
TNO (Netherlands)
Y. Bellouard, Technische Univ. Eindhoven (Netherlands)


Published in SPIE Proceedings Vol. 8969:
Synthesis and Photonics of Nanoscale Materials XI
David B. Geohegan; Frank Träger; Jan J. Dubowski, Editor(s)

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