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Proceedings Paper

Functional metal oxide nanostructures fabricated by 3D-nanotemplate PLD
Author(s): Azusa N. Hattori; Hidekazu Tanaka
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Paper Abstract

By combining inclined pulsed-laser deposition (PLD) with nanoimprint lithography, an original three-dimensional (3D) nanofabrication technique, namely “3D nanotemplate PLD technique E has been established. 3D nanotemplate PLD enables to fabricate the large arrays of programmable ZnO nanostructures: nanoboxes and nanowires with a width of 20nm. Cathodoluminescence (CL) measurements at 300K showed an intense luminescence peak around 380 nm corresponding to near-band-edge (NBE) emission from even a single ZnO nanobox. The CL intensity mapping also showed the brilliant NBE luminescence from the entire single ZnO nanobox. The architecturally designed ZnO nanostructures with an excellent wide-gap luminescent semiconductor character should be good candidates for optoelectronic materials for nanoscale device applications.

Paper Details

Date Published: 8 March 2014
PDF: 7 pages
Proc. SPIE 8987, Oxide-based Materials and Devices V, 89871X (8 March 2014); doi: 10.1117/12.2044357
Show Author Affiliations
Azusa N. Hattori, Osaka Univ. (Japan)
Hidekazu Tanaka, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 8987:
Oxide-based Materials and Devices V
Ferechteh H. Teherani; David C. Look; David J. Rogers, Editor(s)

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