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Proceedings Paper

Fabrication of modulators and 2×2 switches in SOI based on the carrier depletion mechanism for optical interconnects
Author(s): Francisco Lopez-Royo; Antoine Brimont; Christos Vagionas; George Dabos; Nikos Pleros; Konstantinos Vyrsokinos; Amadeu Griol; Juan Hurtado; Laurent Bellieres; Nuria S. Losilla; Pablo Sanchis; Luis Sanchez; Javier Marti
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Paper Abstract

Silicon-photonic 2×2 electro-optical switching elements and modulators based on the carrier depletion mechanism using both dual-resonator and MZI layout configurations have been developed. The passive photonic structures were developed and optimized using a fast design-fabrication-characterization cycle. The main objective is to deliver smallfootprint, low-loss and low-energy silicon photonic electro-optical switching elements and modulators equipped with standard input-output grating couplers and radio-frequency electrical contact tips to allow their characterization in highspeed probe-station setups. The insertion losses, crosstalk, power consumption and BER performance will be addressed for each electro-optical structure. The fabrication steps, including low loss waveguide patterning, pn junction and low resistive ohmic contact formation have been optimized to produce high performance devices with relaxed fabrication tolerances, employing both optical and electron-beam lithography.

Paper Details

Date Published: 8 March 2014
PDF: 9 pages
Proc. SPIE 8991, Optical Interconnects XIV, 899112 (8 March 2014); doi: 10.1117/12.2044245
Show Author Affiliations
Francisco Lopez-Royo, Univ. Politècnica de València (Spain)
Antoine Brimont, Univ. Politècnica de València (Spain)
Christos Vagionas, Ctr. for Research and Technology Hellas (Greece)
Aristotle Univ. of Thessaloniki (Greece)
George Dabos, Ctr. for Research and Technology Hellas (Greece)
Aristotle Univ. of Thessaloniki (Greece)
Nikos Pleros, Ctr. for Research and Technology Hellas (Greece)
Aristotle Univ. of Thessaloniki (Greece)
Konstantinos Vyrsokinos, Ctr. for Research and Technology Hellas (Greece)
Amadeu Griol, Univ. Politècnica de València (Spain)
Juan Hurtado, Univ. Politècnica de València (Spain)
Laurent Bellieres, Univ. Politècnica de València (Spain)
Nuria S. Losilla, Univ. Politècnica de València (Spain)
Pablo Sanchis, Univ. Politècnica de València (Spain)
Luis Sanchez, Univ. Politècnica de València (Spain)
Javier Marti, Univ. Politècnica de València (Spain)


Published in SPIE Proceedings Vol. 8991:
Optical Interconnects XIV
Henning Schröder; Ray T. Chen; Alexei L. Glebov, Editor(s)

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