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Proceedings Paper

Monolithic silicon waveguides in bulk silicon wafers
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Paper Abstract

We demonstrate two silicon photonic technologies for fabrication of monolithic photonic devices in standard silicon. Using these technologies, we demonstrate low-loss silicon waveguides (2.34 dB/cm), double-layer 3D waveguides, and waveguide Bragg reflectors in standard silicon for optical interconnects and sensing applications. These technologies simplify integration of electronics and photonics and are possible alternatives to SOI-based technology for implementation of silicon-photonic devices and systems for optical interconnects and sensing.

Paper Details

Date Published: 19 February 2014
PDF: 7 pages
Proc. SPIE 9010, Next-Generation Optical Networks for Data Centers and Short-Reach Links, 90100G (19 February 2014); doi: 10.1117/12.2044159
Show Author Affiliations
Chia-Ming Chang, Bell Labs., Alcatel-Lucent (United States)
Olav Solgaard, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 9010:
Next-Generation Optical Networks for Data Centers and Short-Reach Links
Atul K. Srivastava, Editor(s)

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