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Proceedings Paper

UV-curable hybrid polymers for optical applications: technical challenges, industrial solutions, and future developments
Author(s): G. Gruetzner; J. Klein; M. Vogler; A. Schleunitz
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Paper Abstract

Advanced micro- and nanofabrication processes are constantly evolving from academic R&D environment towards real production technology. Therefore, the availability of suitable polymers for optical applications plays a crucial role to satisfy not only application based requirements but also the compatibility to industrial production technologies. In this context, UV-curable hybrid polymers, i.e. inorganic-organic materials obtained by sol-gel chemistry, were recently implemented into mass production environment, e.g. for micro-lenses in mobile device applications. In this contribution, we report on the development of innovative hybrid polymers and their tailoring towards an easy and fast processing with reliable and reproducible performance output for industrial large-scale production. Based on a discussion on standard process parameters with respect to optimize the material’s performance, the technical demands of industrial manufacture to the hybrid polymers will be subsequently reviewed by giving selective examples. This will be complemented by a brief description of current R&D activities adapting hybrid polymers to future patterning technologies.

Paper Details

Date Published: 7 March 2014
PDF: 12 pages
Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 897406 (7 March 2014); doi: 10.1117/12.2043038
Show Author Affiliations
G. Gruetzner, micro resist technology GmbH (Germany)
J. Klein, micro resist technology GmbH (Germany)
M. Vogler, micro resist technology GmbH (Germany)
A. Schleunitz, micro resist technology GmbH (Germany)

Published in SPIE Proceedings Vol. 8974:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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