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Proceedings Paper

Optical properties of SnOx thin films: experimental data and theoretical model
Author(s): B. A. Stjerna; Claes-Goeran Granqvist
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Paper Abstract

Snox films were made by reactive ifmagnetron sputtering of Sn in Ar + onto unheated glass. Electrical dc resistivity (Pdc) and spectral optical properties were measured as a function of sputtering parameters. A sharp minimum in Pdc was found at a well-defined gas mixture. Optimized deposition parameters gave films with Pdc 3 x iO c2 cmat low sputter rate (r) and Pdc 102 ç cm at r -3 nm/s. The luminous transmittance was -75 %. The optical and electrical properties could be quantitatively reconciled with a theoretical model for wide-bandgap semiconductors, heavily n-doped by doubly ionized oxygen vacancies, that accounted for ionized impurity scattering of the free electrons.

Paper Details

Date Published: 1 August 1990
PDF: 14 pages
Proc. SPIE 1272, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion IX, (1 August 1990); doi: 10.1117/12.20429
Show Author Affiliations
B. A. Stjerna, Chalmers Univ. of Technology and Univ. of Gothenburg (Sweden)
Claes-Goeran Granqvist, Chalmers Univ. of Technology and Univ. of Gothenburg (Sweden)


Published in SPIE Proceedings Vol. 1272:
Optical Materials Technology for Energy Efficiency and Solar Energy Conversion IX
Claes-Goeran Granqvist; Carl M. Lampert, Editor(s)

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