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Proceedings Paper

Agile scanning using a MEMS focus control mirror in a commercial confocal microscope
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Paper Abstract

We present the use of a large stroke deformable membrane mirror for focus control over a range of 123 μm in a commercial confocal microscope at 0.5-0.64 NA. The MEMS mirror is much faster than lens or stage translation allowing synchronization to x-y scanning for agile control over the 3D shape of the surface that is scanned. We describe a novel, low-actuator-count MEMS mirror designed specifically for focus control in scanning laser microscopes and present images taken with the mirror deployed on an Olympus Fluoview FV300.

Paper Details

Date Published: 12 March 2014
PDF: 11 pages
Proc. SPIE 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI, 89490W (12 March 2014); doi: 10.1117/12.2042249
Show Author Affiliations
Sarah J. Lukes, Montana State Univ. (United States)
David L. Dickensheets, Montana State Univ. (United States)


Published in SPIE Proceedings Vol. 8949:
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI
Thomas G. Brown; Carol J. Cogswell; Tony Wilson, Editor(s)

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