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Proceedings Paper

Gas-mediated charged particle beam processing of nanostructured materials
Author(s): C. J. Lobo; A. A. Martin; C. Elbadawi; J. Bishop; I. Aharonovich; M. Toth
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Paper Abstract

Gas mediated processing under a charged particle (electron or ion) beam enables direct-write, high resolution surface functionalization, chemical dry etching and chemical vapor deposition of a wide range of materials including catalytic metals, optoelectronic grade semiconductors and oxides. Here we highlight three recent developments of particular interest to the optical materials and nanofabrication communities: fabrication of self-supporting, three dimensional, fluorescent diamond nanostructures, electron beam induced deposition (EBID) of high purity materials via activated chemisorption, and post-growth purification of nanocrystalline EBID-grown platinum suitable for catalysis applications.

Paper Details

Date Published: 6 March 2014
PDF: 7 pages
Proc. SPIE 8970, Laser 3D Manufacturing, 89700O (6 March 2014); doi: 10.1117/12.2042021
Show Author Affiliations
C. J. Lobo, Univ. of Technology, Sydney (Australia)
A. A. Martin, Univ. of Technology, Sydney (Australia)
C. Elbadawi, Univ. of Technology, Sydney (Australia)
J. Bishop, Univ. of Technology, Sydney (Australia)
I. Aharonovich, Univ. of Technology, Sydney (Australia)
M. Toth, Univ. of Technology, Sydney (Australia)


Published in SPIE Proceedings Vol. 8970:
Laser 3D Manufacturing
Henry Helvajian; Alberto Piqué; Martin Wegener; Bo Gu, Editor(s)

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