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Proceedings Paper

Large array of 2048 tilting micromirrors for astronomical spectroscopy: optical and cryogenic characterization
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Paper Abstract

Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are engaged in a European development of micromirror arrays (MMA) for generating reflective slit masks in future MOS, called MIRA. MMA with 100 × 200 μm2 single-crystal silicon micromirrors were successfully designed, fabricated and tested. Arrays are composed of 2048 micromirrors (32 x 64) with a peak-to-valley deformation less than 10 nm, a tilt angle of 24° for an actuation voltage of 130 V. The micromirrors were actuated successfully before, during and after cryogenic cooling, down to 162K. The micromirror surface deformation was measured at cryo and is below 30 nm peak-to-valley. These performances demonstrate the ability of such MOEMS device to work as objects selector in future generation of MOS instruments both in ground-based and space telescopes. In order to fill large focal planes (mosaicing of several chips), we are currently developing large micromirror arrays integrated with their electronics.

Paper Details

Date Published: 7 March 2014
PDF: 8 pages
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770Q (7 March 2014); doi: 10.1117/12.2041692
Show Author Affiliations
Frédéric Zamkotsian, Lab. d'Astrophysique de Marseille (France)
Michael Canonica, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Patrick Lanzoni, Lab. d'Astrophysique de Marseille (France)
Wilfried Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Sebastien Lani, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)

Published in SPIE Proceedings Vol. 8977:
MOEMS and Miniaturized Systems XIII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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