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Proceedings Paper

Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography
Author(s): W. Li; D. Patel; C. S. Menoni; A. Stein; W. Chao; E. Anderson; M. C. Marconi
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Paper Abstract

A table top nanofabrication system which combines the classic Talbot imaging effect and a compact table top soft-x ray laser is described in this paper. Periodic nanostructures on millimeter square are fabricated using this robust, simple and defect tolerant fabrication method. Talbot lithography allows for a complete coherent extreme ultraviolet lithography process in a compact table top system. Double exposure allowed for the reduction of the feature sizes.

Paper Details

Date Published: 7 March 2014
PDF: 5 pages
Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 89730D (7 March 2014); doi: 10.1117/12.2041688
Show Author Affiliations
W. Li, Colorado State Univ. (United States)
D. Patel, Colorado State Univ. (United States)
C. S. Menoni, Colorado State Univ. (United States)
A. Stein, Brookhaven National Lab. (United States)
W. Chao, Lawrence Berkeley National Lab. (United States)
E. Anderson, Lawrence Berkeley National Lab. (United States)
M. C. Marconi, Colorado State Univ. (United States)

Published in SPIE Proceedings Vol. 8973:
Micromachining and Microfabrication Process Technology XIX
Mary Ann Maher; Paul J. Resnick, Editor(s)

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