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Proceedings Paper

Study of a-Si crystallization dependence on power and irradiation time using a CW green laser
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Paper Abstract

An advantage of laser crystallization over conventional heating methods is its ability to limit rapid heating and cooling to thin surface layers. Laser energy is used to heat the a-Si thin film to change the microstructure to poly-Si. Thin film samples of a-Si were irradiated with a CW-green laser source. Laser irradiated spots were produced by using different laser powers and irradiation times. These parameters are identified as key variables in the crystallization process. The power threshold for crystallization is reduced as the irradiation time is increased. When this threshold is reached the crystalline fraction increases lineally with power for each irradiation time. The experimental results are analysed with the aid of a numerical thermal model and the presence of two crystallization mechanisms are observed: one due to melting and the other due to solid phase transformation.

Paper Details

Date Published: 6 March 2014
PDF: 10 pages
Proc. SPIE 8968, Laser-based Micro- and Nanoprocessing VIII, 89680U (6 March 2014); doi: 10.1117/12.2041187
Show Author Affiliations
M. Morales, Univ. Politécnica de Madrid (Spain)
D. Munoz-Martin, Univ. Politécnica de Madrid (Spain)
Y. Chen, Univ. Politécnica de Madrid (Spain)
O. García, Univ. Politécnica de Madrid (Spain)
J. J. García-Ballesteros, Univ. Politécnica de Madrid (Spain)
J. Cárabe, Ctr. de Investigaciones Energéticas, Medioambientales y Tecnológicas (Spain)
J. J. Gandía, Ctr. de Investigaciones Energéticas, Medioambientales y Tecnológicas (Spain)
C. Molpeceres, Univ. Politécnica de Madrid (Spain)

Published in SPIE Proceedings Vol. 8968:
Laser-based Micro- and Nanoprocessing VIII
Udo Klotzbach; Kunihiko Washio; Craig B. Arnold, Editor(s)

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