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Proceedings Paper

Rapidly analyzing parametric resonance and manufacturing yield of MEMS 2D scanning mirrors using hybrid finite-element/behavioral modeling
Author(s): Sandipan Maity; Shuangqin Liu; Stephane Rouvillois; Gunar Lorenz; Mattan Kamon
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Paper Abstract

A new hybrid 3D finite-element/behavioral-modeling approach is presented that can be used to accurately predict the nonlinear dynamics (parametric resonance) in electrostatically driven 2D resonant MEMS scanning mirrors. We demonstrate new levels of accuracy and speed for thick SOI scanning mirrors with large scanning angles and validate the modeling approach against measurement on a previously fabricated scanning mirror. The modeling approach is fast and treats the design parameters as variables thus enabling rapid design iterations, automatic sensitivity and statistical yield analyses, and integration with system and circuit simulators for coupled MEMS-IC cosimulation.

Paper Details

Date Published: 7 March 2014
PDF: 9 pages
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770B (7 March 2014); doi: 10.1117/12.2041067
Show Author Affiliations
Sandipan Maity, Coventor, Inc. (United States)
Shuangqin Liu, Coventor, Inc. (United States)
Stephane Rouvillois, Coventor, SARL (France)
Gunar Lorenz, Coventor, SARL (France)
Mattan Kamon, Coventor, Inc. (United States)


Published in SPIE Proceedings Vol. 8977:
MOEMS and Miniaturized Systems XIII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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