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Proceedings Paper

A 1024×1 linear photodiode array sensor with fast readout speed flexible pixel-level integration time and high stability to UV light exposure
Author(s): Takahiro Akutsu; Shun Kawada; Yasumasa Koda; Taiki Nakazawa; Rihito Kuroda; Shigetoshi Sugawa
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Paper Abstract

In this paper, we demonstrate two types of new photodiode array (PDA) with fast readout speed and high stability to ultraviolet (UV) light exposure. One is a high full well capacity sensor specialized for absorption spectroscopy, the other one is a high sensitivity sensor for emission spectroscopy. By introducing multiple readout paths along the long side of the rectangle PD, both two PDAs have achieved more than 150 times faster readout speed compared with a general PDA structure with a single readout path along the short side of PD. By introducing a photodiode (PD) structure with a thin and steep dopant profile p+ layer formed on a flattened Si surface, a higher stability of the light sensitivity to UV light exposure was confirmed compared with a general PD structure for conventional PDAs.

Paper Details

Date Published: 4 March 2014
PDF: 8 pages
Proc. SPIE 9022, Image Sensors and Imaging Systems 2014, 90220L (4 March 2014); doi: 10.1117/12.2040764
Show Author Affiliations
Takahiro Akutsu, Tohoku Univ. (Japan)
Shun Kawada, Tohoku Univ. (Japan)
Yasumasa Koda, Tohoku Univ. (Japan)
Taiki Nakazawa, Tohoku Univ. (Japan)
Rihito Kuroda, Tohoku Univ. (Japan)
Shigetoshi Sugawa, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 9022:
Image Sensors and Imaging Systems 2014
Ralf Widenhorn; Antoine Dupret, Editor(s)

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