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Proceedings Paper

Demonstration of high-performance, sub-micron chalcogenide glass photonic devices by thermal nanoimprint
Author(s): Yi Zou; Loise Moreel; Jie Zhou; Danning Zhang; Hongtao Lin; Lan Li; Qingyang Du; Juejun Hu; Sylvain Danto; Kathleen Richardson; J. David Musgraves; Kevin D. Dobson; Robert Birkmire
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Paper Abstract

High-index-contrast optical devices form the backbone of densely integrated photonic circuits. While these devices are traditionally fabricated using lithography and etching, their performance is often limited by defects and sidewall roughness arising from fabrication imperfections. This paper reports a versatile, roll-to-roll and backend compatible technique for the fabrication of high-performance, high-index-contrast photonic structures in composition-engineered chalcogenide glass (ChG) thin films. Thin film ChG have emerged as important materials for photonic applications due to their high refractive index, excellent transparency in the infrared and large Kerr non-linearity. Both thermally evaporated and solution processed As-Se thin films are successfully employed to imprint waveguides and micro-ring resonators with high replicability and low surface roughness (0.9 nm). The micro-ring resonators exhibit an ultra-high quality-factor of 4 × 105 near 1550 nm wavelength, which represents the highest value reported in ChG micro-ring resonators. Furthermore, sub-micron nanoimprint of ChG films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.

Paper Details

Date Published: 8 March 2014
PDF: 9 pages
Proc. SPIE 8988, Integrated Optics: Devices, Materials, and Technologies XVIII, 898806 (8 March 2014); doi: 10.1117/12.2040454
Show Author Affiliations
Yi Zou, Univ. of Delaware (United States)
Loise Moreel, Univ. of Delaware (United States)
Jie Zhou, Univ. of Delaware (United States)
Danning Zhang, Univ. of Delaware (United States)
Hongtao Lin, Univ. of Delaware (United States)
Lan Li, Univ. of Delaware (United States)
Qingyang Du, Univ. of Delaware (United States)
Juejun Hu, Univ. of Delaware (United States)
Sylvain Danto, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
Kathleen Richardson, CREOL, The College of Optics and Photonics, Univ. of Central Florida (United States)
J. David Musgraves, IRradiance Glass, Inc. (United States)
Kevin D. Dobson, Univ. of Delaware (United States)
Robert Birkmire, Univ. of Delaware (United States)

Published in SPIE Proceedings Vol. 8988:
Integrated Optics: Devices, Materials, and Technologies XVIII
Jean Emmanuel Broquin; Gualtiero Nunzi Conti, Editor(s)

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