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Proceedings Paper

Maximizing laser ablation efficiency of silicon through optimization of the temporal pulse shape
Author(s): Alain Cournoyer; David Gay; Pascal Turbis; Emmanuel Lorin; Martin Briand; Yves Taillon
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Paper Abstract

The commercial availability of fiber lasers based on MOPA architectures with arbitrary temporal pulse shaping capabilities offers completely new possibilities for laser material processing. In this study, based on numerical modeling results in the nanosecond regime for the case of silicon at 1064 nm wavelength, we show that not only the single pulse laser ablation efficiency depends on the temporal pulse shape but, we also demonstrate how a stochastic approach can be applied in order to reach an optimized pulse shape maximizing the material vaporization rate for given laser pulse energy and duration. Experimental results are compared to the numerical modeling results, and the discrepancies are discussed in terms of the role played by plasma shielding effects and melt ejection at high intensity.

Paper Details

Date Published: 6 March 2014
PDF: 12 pages
Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670O (6 March 2014); doi: 10.1117/12.2040343
Show Author Affiliations
Alain Cournoyer, INO (Canada)
David Gay, INO (Canada)
Pascal Turbis, Univ. de Montréal (Canada)
Emmanuel Lorin, Univ. de Montréal (Canada)
Carleton Univ. (Canada)
Martin Briand, INO (Canada)
Yves Taillon, INO (Canada)

Published in SPIE Proceedings Vol. 8967:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX
Yoshiki Nakata; Xianfan Xu; Stephan Roth; Beat Neuenschwander, Editor(s)

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