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Proceedings Paper

High-performance photonic crystal membrane reflectors by magnetically guided metal-assisted chemical etching
Author(s): Yichen Shuai; Karthik Balasundaram; Parsian K. Mohseni; Deyin Zhao; Hongjun Yang; Xiuling Li; Weidong Zhou
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Paper Abstract

Based on Fano resonance principles in photonic crystals, high performance broadband reflectors can be realized with 100% reflection. Applying an innovative magnetic field guided metal-assisted chemical etching (MacEtch) process, we report here high performance membrane reflectors on SOI with controlled sidewall etching and high reflection around 1550 nm. This work represents the first demonstration of magnetically guided MacEtch (h-MacEtch) of periodic arrays of discrete nanoholes of sub-micron dimensions. Such an innovative process can lead to facile formation of large area 2D and 3D nanoscale-structures, for high performance photonic crystal membrane reflectors, filters, and metamaterials.

Paper Details

Date Published: 19 February 2014
PDF: 6 pages
Proc. SPIE 8994, Photonic and Phononic Properties of Engineered Nanostructures IV, 899409 (19 February 2014); doi: 10.1117/12.2040249
Show Author Affiliations
Yichen Shuai, The Univ. of Texas at Arlington (United States)
Karthik Balasundaram, Univ. of Illinois at Urbana-Champaign (United States)
Parsian K. Mohseni, Univ. of Illinois at Urbana-Champaign (United States)
Deyin Zhao, The Univ. of Texas at Arlington (United States)
Hongjun Yang, Semerane, Inc. (United States)
Xiuling Li, Univ. of Illinois at Urbana-Champaign (United States)
Weidong Zhou, The Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 8994:
Photonic and Phononic Properties of Engineered Nanostructures IV
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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