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Proceedings Paper

Multi-layer insulator for low voltage and breakdown voltage enhancement in electrowetting-on-dielectric
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Paper Abstract

Low applied voltage in electrowetting-on-dielectric (EWOD) can be achieved using thin dielectric. However it is followed by high possibility of dielectric failure. On the other hand, multi-layer dielectric has been known as a way to enhance the dielectric reliability by delaying the dielectric breakdown. In this paper, we report a modified structure of multi-layer insulator called sandwich-like multi-layer structure. This structure is built by dividing one layer into two sections and inserting the other layer between them, resulting a stack with an additional layer but identical in thickness with the conventional multi-layer structure. Using Parylene C and Aluminum Oxide (Al2O3), sandwich-like multi-layer structure shows an improvement in dielectric reliability by delaying the occurrence of dielectric breakdown without sacrificing the operational voltage. Dielectric breakdown is investigated by observing the bubbles forming during electrowetting test caused by electrolysis.

Paper Details

Date Published: 8 March 2014
PDF: 6 pages
Proc. SPIE 8987, Oxide-based Materials and Devices V, 89871S (8 March 2014); doi: 10.1117/12.2040234
Show Author Affiliations
Anggita Grisatya, Korean Advance Institute of Science and Technology (Korea, Republic of)
Yong Hyub Won, Korean Advance Institute of Science and Technology (Korea, Republic of)

Published in SPIE Proceedings Vol. 8987:
Oxide-based Materials and Devices V
Ferechteh H. Teherani; David C. Look; David J. Rogers, Editor(s)

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