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Proceedings Paper

Zero-phonon-line pumped 100-kHz Yb:YAG thin disk regenerative amplifier
Author(s): Taisuke Miura; Martin Smrž; Siva Sankar Nagisetty; Ondřej Novák; Michal Chyla; Patricie Severová; Akira Endo; Tomáš Mocek
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Paper Abstract

We are developing 100-kHz picosecond Yb:YAG thin disk regenerative amplifier with 500-W average power for medical and industrial applications. Especially in case of the next generation of semiconductor lithography, high average power solid-state laser with picosecond pulse duration as pre pulse source is a key element to realize 1-kW EUV lithography source. We compared the output characteristics of CW laser operation pumped at 940-nm and 969-nm, and measured the surface temperature of thin disk. We found that the surface temperature of thin disk pumped at 960-nm was much lower than that pumped at 940-nm. We obtained 83-W output from thin disk regenerative amplifier at the repetition rate of 100-kHz pumped at 969-nm. The measured pulse duration was 1.9-ps.

Paper Details

Date Published: 28 February 2014
PDF: 7 pages
Proc. SPIE 8959, Solid State Lasers XXIII: Technology and Devices, 895923 (28 February 2014); doi: 10.1117/12.2040227
Show Author Affiliations
Taisuke Miura, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Martin Smrž, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Siva Sankar Nagisetty, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Czech Technical Univ. in Prague (Czech Republic)
Ondřej Novák, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Michal Chyla, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Czech Technical Univ. of Prague (Czech Republic)
Patricie Severová, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Czech Technical Univ. of Prague (Czech Republic)
Akira Endo, Institute of Physics of the ASCR, v.v.i. (Czech Republic)
Tomáš Mocek, Institute of Physics of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 8959:
Solid State Lasers XXIII: Technology and Devices
W. Andrew Clarkson; Ramesh K. Shori, Editor(s)

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