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Proceedings Paper

Design and analysis of displacement measurement system based on the four-quadrant detector
Author(s): Zi-jun Gao; Li-li Dong; Wen-hai Xu
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Paper Abstract

The four-quadrant detector is mainly used in high-precision displacement measurement and other related fields. With the emergence of displacement problem in a large number of projects, the displacement measurement accuracy, speed and reliability have become increasingly demanding. In this paper, the measurement principle of four-quadrant detector is analyzed theoretically, the displacement measurement system based on four-quadrant detector is designed, and the experimental platform is built to test and validate the stability, measurement accuracy and range of the displacement measurement system. Experimental results show that: the deviation of the same spot position on measurement system is less than 0.17μm. The measurement error of spot displacement is less than 3.7μm.

Paper Details

Date Published: 24 September 2013
PDF: 8 pages
Proc. SPIE 8905, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications, 890531 (24 September 2013); doi: 10.1117/12.2040172
Show Author Affiliations
Zi-jun Gao, Dalian Maritime Univ. (China)
Li-li Dong, Dalian Maritime Univ. (China)
Wen-hai Xu, Dalian Maritime Univ. (China)


Published in SPIE Proceedings Vol. 8905:
International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications
Farzin Amzajerdian; Astrid Aksnes; Weibiao Chen; Chunqing Gao; Yongchao Zheng; Cheng Wang, Editor(s)

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