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Proceedings Paper

Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI
Author(s): S. M. C. Abdulla; B. M. De Boer; J. M. Pozo; J. H. van den Berg; A. Abutan; R. A. J. Hagen; D. M. R. LoCascio; P. J. Harmsma
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Paper Abstract

This article presents work on a Silicon-On-Insulator (SOI) compact sensing platform based on Micro Ring Resonators (MRRs). In order to enable correction for variations in environmental conditions (temperature, mechanical stress etc), a study has been performed on the performance of uncoated sensing MRRs, and of SU8- and SiO2-covered reference MRRs. Excellent shielding for both cover materials has been obtained, however, water permeation into the SU8 causes a slow drift in sensor response. We believe that a user-friendly, low-cost and robust way for optical interfacing to MRR sensor chips is required for practical application in Point-Of-Care diagnostics, and that the cost and complexity of optical-electrical read-out systems must decrease. We have taken first steps to realize that vision, by building a prototype free-space optical coupling set-up, which enables non-photonic experts to characterize surface activation processes using MRRs. Moreover, we present our first steps towards on-chip read-out systems.

Paper Details

Date Published: 8 March 2014
PDF: 6 pages
Proc. SPIE 8990, Silicon Photonics IX, 89900W (8 March 2014); doi: 10.1117/12.2039896
Show Author Affiliations
S. M. C. Abdulla, TNO (Netherlands)
B. M. De Boer, TNO (Netherlands)
J. M. Pozo, TNO (Netherlands)
J. H. van den Berg, TNO (Netherlands)
A. Abutan, TNO (Netherlands)
R. A. J. Hagen, TNO (Netherlands)
D. M. R. LoCascio, TNO (Netherlands)
P. J. Harmsma, TNO (Netherlands)


Published in SPIE Proceedings Vol. 8990:
Silicon Photonics IX
Joel Kubby; Graham T. Reed, Editor(s)

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