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Proceedings Paper

High-performance conformal sensors employing single-crystal silicon nanomembranes
Author(s): Xiaochuan Xu; Harish Subbaraman; Swapnajit Chakravarty; Ray T. Chen
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Paper Abstract

We demonstrate light-weight, conformal, and high-performance flexible sensors fabricated on a large area (>2 cm × 2 cm) silicon nanomembrane transferred onto a flexible substrate. Linear L13 photonic crystal microcavities are designed to provide high quality factors on the flexible platform. Subwavelength grating (SWG) couplers are employed in order to enable efficient light coupling to the device using a single mode fiber. Photonic crystal tapers are implemented at the strip-photonic crystal waveguide interfaces to minimize loss. Preliminary chemical sensing data suggests a sensitivity of 75nm/RIU. Bending tests are further performed in order to demonstrate sensitivityindependent operation.

Paper Details

Date Published: 8 March 2014
PDF: 12 pages
Proc. SPIE 8990, Silicon Photonics IX, 89900U (8 March 2014); doi: 10.1117/12.2039888
Show Author Affiliations
Xiaochuan Xu, Omega Optics, Inc. (United States)
Harish Subbaraman, Omega Optics, Inc. (United States)
Swapnajit Chakravarty, Omega Optics, Inc. (United States)
Ray T. Chen, The Univ. of Texas at Austin (United States)

Published in SPIE Proceedings Vol. 8990:
Silicon Photonics IX
Joel Kubby; Graham T. Reed, Editor(s)

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