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Proceedings Paper

Optomechanical cantilever device for displacement sensing and variable attenuator
Author(s): Peter A. Cooper; Lewis G. Carpenter; Paolo L. Mennea; Christopher Holmes; James C. Gates; Peter G. R. Smith
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Paper Abstract

An optomechanical dual cantilever device has been fabricated with applications as a displacement sensor and variable attenuator. A novel fabrication approach using a precision dicing saw has benefits for fabrication time, cost and energy consumption. The displacement sensor sensitivity is 0.8 dB/micron and a suppression ratio of 25 dB is obtained when the device is used as an attenuator.

Paper Details

Date Published: 7 March 2014
PDF: 9 pages
Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 897413 (7 March 2014); doi: 10.1117/12.2039806
Show Author Affiliations
Peter A. Cooper, Univ. of Southampton (United Kingdom)
Lewis G. Carpenter, Univ. of Southampton (United Kingdom)
Paolo L. Mennea, Univ. of Southampton (United Kingdom)
Christopher Holmes, Univ. of Southampton (United Kingdom)
James C. Gates, Univ. of Southampton (United Kingdom)
Peter G. R. Smith, Univ. of Southampton (United Kingdom)

Published in SPIE Proceedings Vol. 8974:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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