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Proceedings Paper

Precision dicing of optical materials
Author(s): L. G. Carpenter; C. Holmes; P. A. Cooper; J. C. Gates; P. G. R. Smith
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Paper Abstract

Ductile regime dicing has been used to machine a variety of optical materials to produce waveguides for lasers, multimode interference devices and non-linear devices. However, few papers discuss the properties of the machining, either qualitatively or quantitatively. In this work ductile regime dicing of germanium, Yttrium Aluminum Garnet (YAG), lithium niobate and silicon for photonic applications are reported. Machining parameters are discussed, surface micrographs shown, and surface roughnesses are calculated for each sidewall machined. The sidewall average surface roughnesses (Sa) were measured to be 2.1 nm for germanium, 3.5 nm for YAG, 7.9 nm for lithium niobate and 8.6 nm for silicon.

Paper Details

Date Published: 8 March 2014
PDF: 9 pages
Proc. SPIE 8988, Integrated Optics: Devices, Materials, and Technologies XVIII, 898813 (8 March 2014); doi: 10.1117/12.2039754
Show Author Affiliations
L. G. Carpenter, Univ. of Southampton (United Kingdom)
C. Holmes, Univ. of Southampton (United Kingdom)
P. A. Cooper, Univ. of Southampton (United Kingdom)
J. C. Gates, Univ. of Southampton (United Kingdom)
P. G. R. Smith, Univ. of Southampton (United Kingdom)

Published in SPIE Proceedings Vol. 8988:
Integrated Optics: Devices, Materials, and Technologies XVIII
Jean Emmanuel Broquin; Gualtiero Nunzi Conti, Editor(s)

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