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Proceedings Paper

Tolerance analysis for efficient MMI devices in silicon photonics
Author(s): Carmen Vázquez; Alberto Tapetado; Jason Orcutt; Huaiyu Charles Meng; Rajeev Ram
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Paper Abstract

Silicon is considered a promising platform for photonic integrated circuits as they can be fabricated in state-of-the-art electronics foundaries with integrated CMOS electronics. While much of the existing work on CMOS photonics has used directional couplers for power splitting, multimode interference (MMI) devices may have relaxed fabrication requirements and smaller footprints, potentially energy efficient designs. They have already been used as 1x2 splitters, 2x1 combiners in Quadrature Phase Shift Keying modulators, and 3-dB couplers among others. In this work, 3-dB, butterfly and cross MMI couplers are realized on bulk CMOS technology. Footprints from around 40um2 to 200 um2 are obtained. MMI tolerances to manufacturing process and bandwidth are analyzed and tested showing the robustness of the MMI devices.

Paper Details

Date Published: 8 March 2014
PDF: 7 pages
Proc. SPIE 8990, Silicon Photonics IX, 89900A (8 March 2014); doi: 10.1117/12.2039730
Show Author Affiliations
Carmen Vázquez, Univ. Carlos III de Madrid (Spain)
Massachusetts Institute of Technology (United States)
Alberto Tapetado, Univ. Carlos III de Madrid (Spain)
Massachusetts Institute of Technology (United States)
Jason Orcutt, Massachusetts Institute of Technology (United States)
Huaiyu Charles Meng, Massachusetts Institute of Technology (United States)
Rajeev Ram, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 8990:
Silicon Photonics IX
Joel Kubby; Graham T. Reed, Editor(s)

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