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Proceedings Paper

Off-normal patterned etching through suspended membranes
Author(s): D. Bruce Burckel; M. David Henry; Robert L. Jarecki; Paul J. Resnick
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Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 89730C; doi: 10.1117/12.2039681
Show Author Affiliations
D. Bruce Burckel, Sandia National Labs. (United States)
M. David Henry, Sandia National Labs. (United States)
Robert L. Jarecki, Sandia National Labs. (United States)
Paul J. Resnick, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 8973:
Micromachining and Microfabrication Process Technology XIX
Mary Ann Maher; Paul J. Resnick, Editor(s)

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