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Proceedings Paper

40 Gbit/s silicon modulators fabricated on 200-mm and 300-mm SOI wafers
Author(s): Delphine Marris-Morini; Charles Baudot; Jean-Marc Fédéli; Gilles Rasigade; Nathalie Vuillet; Aurélie Souhaité; Melissa Ziebell; Pierette Rivalin; Ségolène Olivier; Paul Crozat; David Bouville; Sylvie Menezo; Frédéric Boeuf; Laurent Vivien
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Paper Abstract

We present 40 Gbit/s optical modulators based on different types of phase shifters (lateral pn, pipin, and interleaved pn junction phase). Those structures were processed both on 200 and 300mm SOI wafers, available in large-scale microelectronic foundries. Both Ring Resonators (RR) and Mach Zehnder (MZ) modulators were fabricated. As an example, MZ modulator based on 0.95 mm long interleaved pn junction phase shifter delivered a high ER of 7.8 dB at 40 Gbit/s with low optical loss of only 4 dB. Ring modulator was also fabricated and characterized at high-speed, exhibiting 40 Gbit/s.

Paper Details

Date Published: 8 March 2014
PDF: 6 pages
Proc. SPIE 8990, Silicon Photonics IX, 899012 (8 March 2014); doi: 10.1117/12.2039288
Show Author Affiliations
Delphine Marris-Morini, Institut d'Électronique Fondamentale, CNRS, Univ. Paris-Sud (France)
Charles Baudot, STMicroelectronics (France)
Jean-Marc Fédéli, CEA-LETI (France)
Gilles Rasigade, Institut d'Électronique Fondamentale, CNRS, Univ. Paris-Sud (France)
Nathalie Vuillet, STMicroelectronics (France)
Aurélie Souhaité, STMicroelectronics (France)
CEA-LETI (France)
Melissa Ziebell, Institut d'Électronique Fondamentale, CNRS, Univ. Paris-Sud (France)
Pierette Rivalin, Institut d'Électronique Fondamentale, CNRS, Univ. Paris-Sud (France)
Ségolène Olivier, CEA-LETI (France)
Paul Crozat, Institut d'Électronique Fondamentale, CNRS, Univ. Paris-Sud (France)
David Bouville, Institut d'Électronique Fondamentale, CNRS, Univ. Paris-Sud (France)
Sylvie Menezo, STMicroelectronics (France)
Frédéric Boeuf, Institut d'Électronique Fondamentale, CNRS, Univ. Paris-Sud (France)
Laurent Vivien, CEA-LETI (France)


Published in SPIE Proceedings Vol. 8990:
Silicon Photonics IX
Joel Kubby; Graham T. Reed, Editor(s)

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