Share Email Print

Proceedings Paper

Laser-induced damage thresholds and optical constants of ion-plated and ion-beam-sputtered Al2O3 and HfO2 coatings for the ultraviolet
Author(s): Alexandra Starke; Harald Schink; Jurgen Kolbe; Johanes Ebert
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

For high power laser applications, extinction coefficients and refractive indices of ion beam sputtered resp. ionplated Hf02-, Si02- and A1203- films were determined by spectrophotometric analysis in the wavelength range between 200 and 500 nm. Film qualities were related to the corresponding process parameters. Qualitative information about water content has been obtained by infrared spectroscopy. Impurities and film stoichiometry were determined by RBS analysis. Laser induced damage thresholds were measured with a (KrF*)excimer laser at 248 nm. The tested samples were single layers as well as high reflecting QWOT stacks. All results were compared with the corresponding values of e-beam coatings.

Paper Details

Date Published: 1 August 1990
PDF: 6 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20391
Show Author Affiliations
Alexandra Starke, Technische Univ. Berlin (Germany)
Harald Schink, Univ. Hannover (Germany)
Jurgen Kolbe, Univ. Hannover (Germany)
Johanes Ebert, Univ. Hannover (Germany)

Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)

© SPIE. Terms of Use
Back to Top