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Proceedings Paper

Low-loss titanium-dioxide strip waveguides by atomic layer deposition
Author(s): M. Roussey; M. Häyrinen; A. Säynätjoki; V. Gandhi; L. Karvonen; P. Stenberg; M. Kuittinen; S. Honkanen
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Paper Abstract

In this paper we describe an approach to reduce the propagation loss in titanium dioxide strip waveguides. We achieved to reduce losses down to 2.4 dB/cm in 1 μm-wide waveguide at λ=1550 nm.

Paper Details

Date Published: 7 March 2014
PDF: 8 pages
Proc. SPIE 8982, Optical Components and Materials XI, 89820E (7 March 2014); doi: 10.1117/12.2038912
Show Author Affiliations
M. Roussey, Univ. of Eastern Finland (Finland)
M. Häyrinen, Univ. of Eastern Finland (Finland)
A. Säynätjoki, Aalto Univ. (Finland)
V. Gandhi, Univ. of Eastern Finland (Finland)
L. Karvonen, Aalto Univ. (Finland)
P. Stenberg, Univ. of Eastern Finland (Finland)
M. Kuittinen, Univ. of Eastern Finland (Finland)
S. Honkanen, Univ. of Eastern Finland (Finland)


Published in SPIE Proceedings Vol. 8982:
Optical Components and Materials XI
Michel J. F. Digonnet; Shibin Jiang, Editor(s)

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