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Proceedings Paper

Miniaturized optical fiber Fabry-Perot interferometer fabricated by femtosecond laser irradiation and selective chemical etching
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Paper Abstract

A U-shaped optical fiber inline microchannel was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. A high quality micro-cavity embedded inside the channel was obtained to construct a Fabry-Perot interferometer (FPI). A fringe visibility of 20 dB in spectrum domain was achieved. High temperature survivability of this micro device was also demonstrated. The proposed assembly-free optical fiber inline interferometer is attractive for sensing applications in high-temperature harsh environments.

Paper Details

Date Published: 7 March 2014
PDF: 7 pages
Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 89741A (7 March 2014); doi: 10.1117/12.2038824
Show Author Affiliations
Lei Yuan, Beijing Institute of Technology (China)
Clemson Univ. (United States)
Xinwei Lan, Clemson Univ. (United States)
Jie Huang, Clemson Univ. (United States)
Hanzheng Wang, Clemson Univ. (United States)
Baokai Cheng, Clemson Univ. (United States)
Jie Liu, Clemson Univ. (United States)
Hai Xiao, Clemson Univ. (United States)


Published in SPIE Proceedings Vol. 8974:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)

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