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Proceedings Paper

Developing dual-beam laser Doppler interferometry system for opto-piezoelectric materials based ultrasonic parking sensors and optofluidics sensors
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Paper Abstract

Adopting opto-piezoelectric materials, which utilized optical illumination pattern to effect the spatial force distribution induced by piezoelectric materials, to ultrasonic parking sensors and optofluidic chips represent a new research direction in industrial sub-system development. To accommodate performance requirements include wide bandwidth, ultrahigh precision, non-contact measurement mode, linear and angular measurement, etc. associated with the evaluation of the above-mentioned systems, a laser Doppler interferometer was implemented to facilitate the system development. The completely orthogonal alignment design configuration, system performance verified, signal processing algorithms developed as well as the experimental results obtained were all discussed in this paper. Emphasis is on the experimental data obtained from the interferometer and the design changes developed based on the metrology outcome. The system performance improvements induced by the experimental verification achieved by the interferometer were discussed in detail.

Paper Details

Date Published: 8 March 2014
PDF: 15 pages
Proc. SPIE 8992, Photonic Instrumentation Engineering, 89920S (8 March 2014); doi: 10.1117/12.2038709
Show Author Affiliations
Po-Cheng Lai, National Taiwan Univ. (Taiwan)
Chih-Kung Lee, National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 8992:
Photonic Instrumentation Engineering
Yakov G. Soskind; Craig Olson, Editor(s)

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