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Proceedings Paper

Three-dimensional collimation of in-plane-propagating light using silicon micromachined mirror
Author(s): Yasser M. Sabry; Diaa Khalil; Bassam Saadany; Tarik Bourouina
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Paper Abstract

We demonstrate light collimation of single-mode optical fibers using deeply-etched three-dimensional curved micromirror on silicon chip. The three-dimensional curvature of the mirror is controlled by a process combining deep reactive ion etching and isotropic etching of silicon. The produced surface is astigmatic with out-of-plane radius of curvature that is about one half the in-plane radius of curvature. Having a 300-μm in-plane radius and incident beam inplane inclined with an angle of 45 degrees with respect to the principal axis, the reflected beam is maintained stigmatic with about 4.25 times reduction in the beam expansion angle in free space and about 12-dB reduction in propagation losses, when received by a limited-aperture detector.

Paper Details

Date Published: 7 March 2014
PDF: 7 pages
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770J (7 March 2014); doi: 10.1117/12.2038671
Show Author Affiliations
Yasser M. Sabry, Ecole Supérieure d’Ingénieurs en Electronique et Electrotechnique (France)
Si-Ware Systems (Egypt)
Ain Shams Univ. (Egypt)
Diaa Khalil, Si-Ware Systems (Egypt)
Ain-Shams Univ. (Egypt)
Bassam Saadany, Si-Ware Systems (Egypt)
Tarik Bourouina, Ecole Supérieure d’Ingénieurs en Electronique et Electrotechnique (France)
Si-Ware Systems (Egypt)


Published in SPIE Proceedings Vol. 8977:
MOEMS and Miniaturized Systems XIII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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