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Proceedings Paper

Development of narrow-linewidth Yb- and Er- fiber lasers and frequency mixing for ArF excimer laser seeding
Author(s): Hongwen Xuan; Zhigang Zhao; Hironori Igarashi; Shinji Ito; Kouji Kakizaki; Yohei Kobayashi
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Paper Abstract

We propose and report a 193 nm narrow-linewidth light generation by a frequency mixing of Yb and Er-fiber lasers as the seed for an ArF excimer laser. The Yb-fiber laser includes a pulsed distributed feedback (DFB) or external cavity diode laser (ECDL), acousto-optic modulator(AOM), fiber amplifiers and an Yb:YAG single crystal fiber (SCF) power amplifier with more than 7 W output. The Er-fiber laser consists of a continuous-wave (CW) DFB laser, a semiconductor optical amplifier (SOA), and fiber amplifiers. The second harmonic generation (SHG) and the fourth harmonic generation (FHG) of Yb laser at 515 nm and 258 nm reach 5 W and 1.5 W, respectively. Two stages of sum-frequency generation (SFG) produce the power of 100 mW for 193 nm laser by use of CLBO crystals.

Paper Details

Date Published: 12 March 2014
PDF: 6 pages
Proc. SPIE 8961, Fiber Lasers XI: Technology, Systems, and Applications, 89612M (12 March 2014); doi: 10.1117/12.2038318
Show Author Affiliations
Hongwen Xuan, The Univ. of Tokyo (Japan)
Zhigang Zhao, The Univ. of Tokyo (Japan)
Hironori Igarashi, Gigaphoton Inc. (Japan)
Shinji Ito, Gigaphoton Inc. (Japan)
Kouji Kakizaki, Gigaphoton Inc. (Japan)
Yohei Kobayashi, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 8961:
Fiber Lasers XI: Technology, Systems, and Applications
Siddharth Ramachandran, Editor(s)

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