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Proceedings Paper

Control of parameters of diffraction gratings on mirrors with multilayer coatings
Author(s): M. F. Malkhozov; A. S. Popov; V. M. Mjakinkov
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Paper Abstract

This paper contains the results of the theoretical and experimental investigations of the light diffraction on the gratings on the layered coatings. The theoretical expressions for the diffraction intensities for some practically important cases are obtained.Discussion is focused ()fl the problem of using theoretical results for control and measuring parameters of the diffraction gratings and thin films.

Paper Details

Date Published: 1 August 1990
PDF: 6 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20383
Show Author Affiliations
M. F. Malkhozov, PNITI (Russia)
A. S. Popov, PNITI (Russia)
V. M. Mjakinkov, PNITI (Russia)


Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)

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