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Proceedings Paper

Resonator structures on AlN ceramics surface treated by laser radiation
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Paper Abstract

In this paper a method for producing resonant structures using laser micromachining is presented. In the spot of laser beam impact on AlN ceramics surface a conductive aluminum layer is formed. Compilation of process parameters allows for the fabrication of structures with resistance at Rs ~ 0.01Ω/Rs. It has been also found out that the maximum value of resistance for which spiral resonator structures manifest their unique properties is at the level of Rs = 1.43 Ω. Furthermore, the occurrence of mutual capacity which value is dependent on the arrangement of individual SR structures with respect to each other was observed and examined. Based on satisfactory results for SR structures, it has been attempted to produce a resonant structures dedicated to the THz range based on the process of direct metallization of AlN ceramics surface. As a result, the Split Ring Resonator structure whose properties were verified by using the THz -TDS method was manufactured. In case of the field E perpendicular to SRR structure and one resonance area for 0.50 THz with field E parallel to the structure, two characteristic resonant dips for 0.22 THz and 0.46 THz were obtained. The studies confirmed that the method of direct metallization of AlN ceramics allows to produce resonant structures in the THz range.

Paper Details

Date Published: 7 March 2014
PDF: 9 pages
Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 89730Q (7 March 2014); doi: 10.1117/12.2037937
Show Author Affiliations
Pawel E. Koziol, Wroclaw Univ. of Technology (Poland)
Arkadiusz J. Antonczak, Wroclaw Univ. of Technology (Poland)
Bogusz Stepak, Wroclaw Univ. of Technology (Poland)
Przemyslaw A. Gorski, Wroclaw Univ. of Technology (Poland)
Michal Walczakowski, Military Univ. of Technology (Poland)
Norbert Palka, Military Univ. of Technology (Poland)
Krzysztof M. Abramski, Wroclaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 8973:
Micromachining and Microfabrication Process Technology XIX
Mary Ann Maher; Paul J. Resnick, Editor(s)

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