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Proceedings Paper

MEMS Fabry-Perot interferometer with Si-air mirrors for mid- and thermal infrared
Author(s): Mikko Tuohiniemi; Antti Näsilä; Altti Akujärvi
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Paper Abstract

We studied how a surface-micromachined Fabry-Perot interferometer, realized with Si / air-gap distributed Bragg reflectors, would perform at the middle-infrared wavelengths. Compared with traditional solid-film pairs, this Si-FPI technology features better index contrast, which enables wider stop band and potentially higher resolution. Four different designs of interferometers were prepared and compared. Two designs apply the solid-film reflectors of Si/SiO2 structure. Their data is exploited as a reference of a middle-infrared interferometer and, as a template for mapping the performance from the simulation results to the measured data. The third design operates at the thermal infrared and it was our first embodiment with the Si/air-gap mirrors. The performance, reported earlier, is here referred to for estimating the technology scalability down to shorter wavelengths. Finally, we realized a non-tunable proof-of-concept version of the Si/air-gap technology for middle infrared. The measured data is mapped into an estimate of the achievable performance of a tunable version. We present the transmission and resolution data and argument the simulation models that reproduce the data. The prediction for the tunable middle-infrared Si-FPI is then presented. The results indicate that such a device is expected to have two-fold better resolution and a clearly wider stop band, compared with the prior art.

Paper Details

Date Published: 7 March 2014
PDF: 10 pages
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770G (7 March 2014); doi: 10.1117/12.2037915
Show Author Affiliations
Mikko Tuohiniemi, VTT Technical Research Ctr. of Finland (Finland)
Antti Näsilä, VTT Technical Research Ctr. of Finland (Finland)
Altti Akujärvi, VTT Technical Research Ctr. of Finland (Finland)

Published in SPIE Proceedings Vol. 8977:
MOEMS and Miniaturized Systems XIII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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