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Proceedings Paper

Design and fabrication of micro-bolometer array with double layers structure
Author(s): Jun Wang; Jun Gou; Weizhi Li; Deen Gu; Yadong Jiang
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Paper Abstract

In order to increase the fill factor of small size micro-bolometer, double layer micro-bolometer was designed in this paper with bottom sensitive/ top absorber structure. The deformation and residual stress characters of single layer and double layer structure models were simulated and optimized, and with the optimized results, double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes. The surface image and deformation information of the fabricated micro-bolometer was tested. By using double layer structure, the area of membrane increases by a factor of 1.99 and 3.6 for the “L” shape leg structure and long “S” shape structure, respectively.

Paper Details

Date Published: 21 December 2013
PDF: 7 pages
Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470I (21 December 2013); doi: 10.1117/12.2037899
Show Author Affiliations
Jun Wang, Univ. of Electronic Science and Technology of China (China)
Jun Gou, Univ. of Electronic Science and Technology of China (China)
Weizhi Li, Univ. of Electronic Science and Technology of China (China)
Deen Gu, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 9047:
2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
Zhiping Zhou; Changhe Zhou; Zhiping Zhou, Editor(s)

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