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Proceedings Paper

Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach
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Paper Abstract

An increase of industrial needs for micro-ablation and surface structuration using sub-picosecond laser working at high repetition rate is required. In this context, new industrial lasers were recently commercialized for such a type of purpose. The potential of a new industrial femtosecond laser source (Tangerine model from Amplitude Système) is investigated in this work for different etching purposes. Our experimental results will be also compared to those obtained when using Ti:Sa laser source, with the help of numerical simulations.

Paper Details

Date Published: 6 March 2014
PDF: 10 pages
Proc. SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 89670U (6 March 2014); doi: 10.1117/12.2037736
Show Author Affiliations
Julien Zelgowski, Icube (France)
IREPA LASER (France)
Lab. Hubert Curien (France)
Frédéric Mermet, IREPA LASER (France)
Frédéric Antoni, Icube (France)
Cyril Mauclair, Lab. Hubert Curien (France)
GIE Manutech-USD (France)
Eric Fogarassy, Icube (France)
Eric Mottay, Amplitude Systèmes (France)


Published in SPIE Proceedings Vol. 8967:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX
Yoshiki Nakata; Xianfan Xu; Stephan Roth; Beat Neuenschwander, Editor(s)

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