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Proceedings Paper

High-speed deformation measurement using spatially phase-shifted speckle interferometry
Author(s): Tobias Beckmann; Markus Fratz; Alexander Bertz; Daniel Carl
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Paper Abstract

Electronic speckle pattern interferometry (ESPI) is a powerful technique for differential shape measurement with submicron resolution. Using spatial phase-shifting (SPS), no moving parts are required, allowing frame acquisition rates limited by camera hardware. We present ESPI images of 1 megapixel resolution at 500 fps. Analysis of SPS data involves complex, time-consuming calculations. The graphics processing units found in state-of-the-art personal computers have exceptional parallel processing capabilities, allowing real-time SPS measurements at video frame rates. Deformation analysis at this frame rate can be used to analyze transient phenomena such as transient temperature effects in integrated circuit chips or during material processing.

Paper Details

Date Published: 25 February 2014
PDF: 8 pages
Proc. SPIE 9006, Practical Holography XXVIII: Materials and Applications, 90060E (25 February 2014); doi: 10.1117/12.2037718
Show Author Affiliations
Tobias Beckmann, Fraunhofer-Institut für Physikalische Messtechnik (Germany)
Markus Fratz, Fraunhofer-Institut für Physikalische Messtechnik (Germany)
Alexander Bertz, Fraunhofer-Institut für Physikalische Messtechnik (Germany)
Daniel Carl, Fraunhofer-Institut für Physikalische Messtechnik (Germany)


Published in SPIE Proceedings Vol. 9006:
Practical Holography XXVIII: Materials and Applications
Hans I. Bjelkhagen; V. Michael Bove, Editor(s)

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