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Proceedings Paper

Optimized design and error analysis of optical system for heterodyne grating interferometry
Author(s): Cunbao Lin; Shuhua Yan; Chunhua Wei; Guochao Wang; Pengfei Zou
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Paper Abstract

Based on the detailed derivation of the displacement measurement principle with Jones matrix method, the optical system of the heterodyne grating interferometry that we previously proposed was modified. A reflection phase grating with smaller grating pitch was designed with rigorous coupled-wave analysis (RCWA) to improve the measurement performance. The first order diffraction efficiency of 47.35% and 56.24% were obtained for TE and TM polarization, respectively. Therefore the TM polarization was chose to enhance the signal-to-noise ratio (SNR) of the beat signal. Meanwhile, the errors of the optical system resulting from grating non-uniformity, frequency mixing, polarization mixing and polarization-frequency mixing were discussed as well. It was shown that the frequency mixing was the main source of the errors, and the modified heterodyne grating interferometry had the potential to realize nanometer resolution for displacement measurement.

Paper Details

Date Published: 19 December 2013
PDF: 10 pages
Proc. SPIE 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 90460C (19 December 2013); doi: 10.1117/12.2037576
Show Author Affiliations
Cunbao Lin, National Univ. of Defense Technology (China)
Shuhua Yan, National Univ. of Defense Technology (China)
Chunhua Wei, National Univ. of Defense Technology (China)
Guochao Wang, National Univ. of Defense Technology (China)
Pengfei Zou, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 9046:
2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Hwa-Yaw Tam; Kexin Xu; Hai Xiao; Jigui Zhu, Editor(s)

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