Proceedings Paper
Measuring surface roughness of an optical thin film with scanning tunneling microscopes| Format | Member Price | Non-Member Price |
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Paper Abstract
Surface roughness of a fine metallic film. i.e.. mirror finished. has been determined by
a Scanning Tunneling Microscope (STM). The mean value o the roughness is measured
based on STM images of a three dimensional line plot of the surface profile. The
technique is found capable of determining the roughness in a nanoscopic scale, lO m.
Such technique is used in the present work to measure the roughness of various thin
films ( 1 5 tm) in amorphous and crystalline structures.
Paper Details
Date Published: 1 August 1990
PDF: 4 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20373
Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)
PDF: 4 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20373
Show Author Affiliations
Khaled J. Habib, Kuwait Institute for Scientific Research (Kuwait)
Virgil B. Eling, Digital Instruments, Inc. (United States)
Virgil B. Eling, Digital Instruments, Inc. (United States)
C. Wu, Digital Instruments, Inc. (United States)
Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)
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