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Proceedings Paper

Measuring surface roughness of an optical thin film with scanning tunneling microscopes
Author(s): Khaled J. Habib; Virgil B. Eling; C. Wu
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Paper Abstract

Surface roughness of a fine metallic film. i.e.. mirror finished. has been determined by a Scanning Tunneling Microscope (STM). The mean value o the roughness is measured based on STM images of a three dimensional line plot of the surface profile. The technique is found capable of determining the roughness in a nanoscopic scale, lO m. Such technique is used in the present work to measure the roughness of various thin films ( 1 5 tm) in amorphous and crystalline structures.

Paper Details

Date Published: 1 August 1990
PDF: 4 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20373
Show Author Affiliations
Khaled J. Habib, Kuwait Institute for Scientific Research (Kuwait)
Virgil B. Eling, Digital Instruments, Inc. (United States)
C. Wu, Digital Instruments, Inc. (United States)

Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)

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