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Proceedings Paper

Design and finite element analysis of the vibration isolation system of STM
Author(s): Yunqiang Liu; Xing Fu; Linyan Xu; Yunpeng Song
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Paper Abstract

Vibration isolation system is a prerequisite to achieve high resolution picture using scanning tunnel microscope (STM). The principle of spring damping isolation, staked flat-elastomer isolation, pneumatic isolation, and sandbox damping isolation is introduced. The relationship between resonant frequency of the isolation and the effect is presented. The four resonant frequencies are calculated through Finite Element Analysis (FEA). The four vibration isolations is designed and optimized according to the analysis. The experimental results show that spring damping isolation has the best effect and a transfer ratio of 10-6(120dB) can be obtained.

Paper Details

Date Published: 10 October 2013
PDF: 9 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89160Y (10 October 2013); doi: 10.1117/12.2036878
Show Author Affiliations
Yunqiang Liu, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Linyan Xu, Tianjin Univ. (China)
Yunpeng Song, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)

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