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Proceedings Paper

Optically pumped deep-ultraviolet AlGaN multi-quantum-well lasers grown by metalorganic chemical vapor deposition
Author(s): Yuh-Shiuan Liu; Tsung-Ting Kao; Md. Mahbub Satter; Zachary Lochner; Xiao-Hang Li; Shyh-Chiang Shen; P. Douglas Yoder; Theeradetch Detchprohm; Russell D. Dupuis; Yong Wei; Hongen Xie; Alec Fischer; Fernando A. Ponce
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Paper Abstract

A 245.3 nm deep ultraviolet optically pumped AlGaN based multiple-quantum-well laser operating at room temperature is described. Epitaxial growth was performed by metalorganic chemical vapor deposition on a c-plane bulk AlN substrate at a growth temperature of ~ 1130 °C. The wafer was fabricated into cleaved bars with a cavity length of ~1.45 mm and the lasing threshold was determined to be 297 kW/cm2 under pulsed 193 nm ArF excimer laser excitation. A further ~20% reduction in threshold pumping power density was observed with six pairs of SiO2/HfO2 distributed Bragg reflector deposited at the rear side of facets.

Paper Details

Date Published: 27 February 2014
PDF: 7 pages
Proc. SPIE 9002, Novel In-Plane Semiconductor Lasers XIII, 90020H (27 February 2014); doi: 10.1117/12.2036835
Show Author Affiliations
Yuh-Shiuan Liu, Georgia Institute of Technology (United States)
Tsung-Ting Kao, Georgia Institute of Technology (United States)
Md. Mahbub Satter, Georgia Institute of Technology (United States)
Zachary Lochner, Georgia Institute of Technology (United States)
Xiao-Hang Li, Georgia Institute of Technology (United States)
Shyh-Chiang Shen, Georgia Institute of Technology (United States)
P. Douglas Yoder, Georgia Institute of Technology (United States)
Theeradetch Detchprohm, Georgia Institute of Technology (United States)
Russell D. Dupuis, Georgia Institute of Technology (United States)
Yong Wei, Arizona State Univ. (United States)
Hongen Xie, Arizona State Univ. (United States)
Alec Fischer, Arizona State Univ. (United States)
Fernando A. Ponce, Arizona State Univ. (United States)


Published in SPIE Proceedings Vol. 9002:
Novel In-Plane Semiconductor Lasers XIII
Alexey A. Belyanin; Peter M. Smowton, Editor(s)

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